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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 千葉 広文鈴木 裕輝夫安田 喜昭熊谷 光恭小山 孝明田中 秀治
- Alternative Title
- Development of Silicon Wafer Packaging Technology for Deep UV LED
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 36:2019.11.19-21
- Volume
- 36
- Pages
- 5p
- Publication date of volume/issue (W3CDTF)
- 2019-11