集積回路配線における自己形成バリヤ層

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Material Type: 記事
Title: 集積回路配線における自己形成バリヤ層
Author/Editor: 小池淳一
Author Heading: 小池淳一
Alternative Title: Self-forming barriers in large-scale integrated circuits
Periodical title: 応用物理
No. or year of volume/issue: 90(10)=1031:2021.10
Volume: 90
Issue: 10
Sequential issue number: 1031
Pages: 600-609
Publication date of volume/issue (W3CDTF): 2021-10
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031761193
http://id.ndl.go.jp/bib/031761193
Bibliographic Record Category (NDL): 632