反応性イオンエッチングと集束イオンビーム加工を併用したマイクロ流体デバイスの作製 (特集 微細構造の作製技術とその応用)
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- Material Type
- 記事
- Author/Editor
- 東 直輝
- Series Title
- Author Heading
- Alternative Title
- Fabrication of Microfluidic Device by Reactive Ion Etching and Focused Ion Beam Milling
- Periodical title
- トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
- No. or year of volume/issue
- 66(10):2021
- Volume
- 66
- Issue
- 10