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Volume number14号 2021年10月
表面性状の高精度測定...

表面性状の高精度測定と光学シミュレーションへの活用 : 微小表面幾何構造からの光散乱特性の予測

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表面性状の高精度測定と光学シミュレーションへの活用 : 微小表面幾何構造からの光散乱特性の予測

Call No. (NDL)
Z74-G181
Bibliographic ID of National Diet Library
031827314
Material type
記事
Author
豊田 敏裕ほか
Publisher
静岡 : 静岡県工業技術研究所企画調整部
Publication date
2021-10
Material Format
Paper
Journal name
静岡県工業技術研究所研究報告 = Reports of the Industrial Research Institute of Shizuoka Prefecture / 静岡県工業技術研究所企画調整部 編 (14):2021.10
Publication Page
p.13-21
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Paper

Material Type
記事
Author/Editor
豊田 敏裕
志智 亘
栁原 亘
木野 直樹
鬼久保 郁雄
鈴木 敬明
Alternative Title
High precision measurements of surface textures and their utilization in optical simulations : Estimation of the characteristics of light scattered from a surface geometric microstructure
Periodical title
静岡県工業技術研究所研究報告 = Reports of the Industrial Research Institute of Shizuoka Prefecture / 静岡県工業技術研究所企画調整部 編
No. or year of volume/issue
(14):2021.10
Issue
14
Pages
13-21
Publication date of volume/issue (W3CDTF)
2021-10