真空統合型PVD+CVD成膜装置の開発 : コンバイナー方式HUD用Al-SiO-NbO系耐湿多層反射膜への適用 (特集 SDGs)

真空統合型PVD+CVD成膜装置の開発 : コンバイナー方式HUD用Al-SiO-NbO系耐湿多層反射膜への適用

(特集 SDGs)

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Material Type: 記事
Title: 真空統合型PVD+CVD成膜装置の開発 : コンバイナー方式HUD用Al-SiO-NbO系耐湿多層反射膜への適用
Author/Editor: 深田和宏
福山聡
難波武志
栗原義明
末木凜太郎
Series Title: 特集 SDGs
Author Heading: 深田和宏
福山聡
難波武志
栗原義明
末木凜太郎
Periodical title: 芝浦機械技報 = Shibaura Machine engineering review
No. or year of volume/issue: 28:2021.12
Volume: 28
Pages: 13-16
Publication date of volume/issue (W3CDTF): 2021-12
ISSN (Periodical Title): 2436-7605
ISSN-L (Periodical Title): 2436-7605
Publication (Periodical Title): 座間 : 芝浦機械 = Shibaura Machine
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-2644
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031982591
http://id.ndl.go.jp/bib/031982591
Bibliographic Record Category (NDL): 632