FIBによる透過型電子顕微鏡用試験片の作製と観察 (特集 Ra,Rzだけじゃない! 仕上げ面の表と"裏",その評価と応用)

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FIBによる透過型電子顕微鏡用試験片の作製と観察

(特集 Ra,Rzだけじゃない! 仕上げ面の表と"裏",その評価と応用)

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
032382942
Material type
記事
Author
押川 浩之
Publisher
東京 : 砥粒加工学会
Publication date
2022-09
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 66(9)=481:2022.9
Publication Page
p.498-501
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Paper

Material Type
記事
Author/Editor
押川 浩之
Author Heading
Alternative Title
Sample preparation and observation for transmission electron microscope by FIB
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
66(9)=481:2022.9
Volume
66
Issue
9