ウエハ接合強度の長期負荷及び測定環境の影響

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Material Type: 記事
Title: ウエハ接合強度の長期負荷及び測定環境の影響
Author/Editor: 佐野麻理恵
岩田知也
布施淳也
吉原佑樹
根本俊介
井上史大
Author Heading: 佐野麻理恵
岩田知也
布施淳也
吉原佑樹
根本俊介
井上史大
Alternative Title: Impact of Long-term Stress and Measurement Environment on Bonding Strength
Periodical title: マイクロエレクトロニクスシンポジウム論文集
No. or year of volume/issue: 33:2023.9.6-8
Volume: 33
Pages: 389-391
Publication date of volume/issue (W3CDTF): 2023-09
Publication (Periodical Title): 東京 : エレクトロニクス実装学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1617
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 033135136
http://id.ndl.go.jp/bib/033135136
Bibliographic Record Category (NDL): 632