Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field (Special Issue on On-Machine and In-Process Measurement for Smart and Precision Manufacturing)
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- Material Type
- 記事
- Author/Editor
- Thitipat PermpatdechakulPanart KhajornrungruangKeisuke SuzukiAran BlattlerJiraphan Inthiam
- Series Title
- Author Heading
- Periodical title
- International journal of automation technology
- No. or year of volume/issue
- 18(1)=99:2024.1
- Volume
- 18
- Issue
- 1
- Sequential issue number
- 99