Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field (Special Issue on On-Machine and In-Process Measurement for Smart and Precision Manufacturing)

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Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field(Special Issue on On-Machine and In-Process Measurement for Smart and Precision Manufacturing)

Call No. (NDL)
Z78-A598
Bibliographic ID of National Diet Library
033252388
Material type
記事
Author
Thitipat Permpatdechakulほか
Publisher
Tokyo : Fuji Technology Press
Publication date
2024-01
Material Format
Paper
Journal name
International journal of automation technology 18(1)=99:2024.1
Publication Page
p.47-57
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Paper Digital

Material Type
記事
Author/Editor
Thitipat Permpatdechakul
Panart Khajornrungruang
Keisuke Suzuki
Aran Blattler
Jiraphan Inthiam
Periodical title
International journal of automation technology
No. or year of volume/issue
18(1)=99:2024.1
Volume
18
Issue
1
Sequential issue number
99