スパッタ堆積と高温アニールで作製した低欠陥密度AlNテンプレートと深紫外LED (特集 深紫外光デバイスの進展とその応用)

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スパッタ堆積と高温アニールで作製した低欠陥密度AlNテンプレートと深紫外LED

(特集 深紫外光デバイスの進展とその応用)

Call No. (NDL)
Z16-1255
Bibliographic ID of National Diet Library
033524769
Material type
記事
Author
三宅 秀人ほか
Publisher
東京 : オプトロニクス社
Publication date
2024-05
Material Format
Paper
Journal name
Optronics : 光技術コーディネートジャーナル 43(5)=509:2024.5
Publication Page
p.88-92
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Paper

Material Type
記事
Author/Editor
三宅 秀人
上杉 謙次郎
赤池 良太
Alternative Title
Low-defect-density AlN templates fabricated by sputter deposition and high-temperature annealing, and deep ultraviolet LEDs
Periodical title
Optronics : 光技術コーディネートジャーナル
No. or year of volume/issue
43(5)=509:2024.5
Volume
43
Issue
5