偏光観察によるパワー...

偏光観察によるパワーデバイスSiC基板の結晶欠陥可視化

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偏光観察によるパワーデバイスSiC基板の結晶欠陥可視化

Call No. (NDL)
Z17-313
Bibliographic ID of National Diet Library
033770943
Material type
記事
Author
原田 俊太ほか
Publisher
仙台 : 日本金属学会 ; 1994-
Publication date
2024-10
Material Format
Paper
Journal name
まてりあ = Materia Japan 63(10):2024.10
Publication Page
p.687-694
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Bibliographic Record

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Paper

Material Type
記事
Author/Editor
原田 俊太
村山 健太
Alternative Title
Polarized Light Observation for Visualization of Crystalline Defects in SiC Wafers for Power Device Applications
Periodical title
まてりあ = Materia Japan
No. or year of volume/issue
63(10):2024.10
Volume
63
Issue
10
Pages
687-694