原子間力顕微鏡における制御応用とその展望 (ナノ・マイクロテクノロジーの制御理論と応用特集号)
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- Material Type
- 記事
- Title
- Author/Editor
- 山末 耕平引原 隆士
- Series Title
- Alternative Title
- Recent trends and perspectives on control application in atomic force microscopy
- Periodical title
- システム・制御・情報 = Systems, control and information : システム制御情報学会誌
- No. or year of volume/issue
- 53(6) 2009
- Volume
- 53
- Issue
- 6