ナノスケールMOSデバイスにおける界面物性の揺らぎ--界面トラップ1個1個を検出して評価する (情報化社会を支えるシリコンLSI--信頼性とばらつきの物理)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 土屋 敏章
- Series Title
- Author Heading
- Alternative Title
- Fluctuation of interface properties in nanoscale MOS devices: characterization of individual interface traps
- Periodical title
- 応用物理
- No. or year of volume/issue
- 78(9) 2009.9
- Volume
- 78
- Issue
- 9