SEM式ナノプロービングシステムの開発と半導体デバイス解析への応用(特集 SPMによる半導体表面分析の最近の展開)

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Material Type: 記事
Title: SEM式ナノプロービングシステムの開発と半導体デバイス解析への応用
Author/Editor: 三井泰裕
Series Title: 特集 SPMによる半導体表面分析の最近の展開
Author Heading: 三井泰裕
Alternative Title: Development of SEM based nano-probing system and its application
Periodical title: 顕微鏡 = Microscopy / 「顕微鏡」編集委員会編
No. or year of volume/issue: 44(3) 2009
Volume: 44
Issue: 3
Pages: 157～160
Publication date of volume/issue (W3CDTF): 2009
ISSN (Periodical Title): 1349-0958
ISSN-L (Periodical Title): 1349-0958
Publication (Periodical Title): 東京 : 日本顕微鏡学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: ナノプロービングシステム
SEM
故障解析
LSI
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-896
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10467313
http://id.ndl.go.jp/bib/10467313
Bibliographic Record Category (NDL): 632