雑誌研究報告
Volume number(15) 2009
Article赤外吸収分光法による...

赤外吸収分光法による多結晶シリコン中の酸素および炭素濃度の定量測定

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赤外吸収分光法による多結晶シリコン中の酸素および炭素濃度の定量測定

Call No. (NDL)
Z14-B377
Bibliographic ID of National Diet Library
10548172
Material type
記事
Author
小野 春彦ほか
Publisher
海老名 : 神奈川県産業技術センター
Publication date
2009
Material Format
Digital
Journal name
研究報告 = Reports of Kanagawa Industrial Technology Center / 神奈川県産業技術センター [編] (15) 2009
Publication Page
p.19～23
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Digital

Material Type
記事
Title
赤外吸収分光法による多結晶シリコン中の酸素および炭素濃度の定量測定
Author/Editor
小野 春彦
石塚 貴英
小椋 厚志
Author Heading
小野 春彦
石塚 貴英
小椋 厚志
Alternative Title
Determination of the oxygen and carbon concentration in polycrystalline silicon by infrared absorption spectroscopy
Periodical title
研究報告 = Reports of Kanagawa Industrial Technology Center / 神奈川県産業技術センター [編]
No. or year of volume/issue
(15) 2009
Issue
15
Pages
19～23
Publication date of volume/issue (W3CDTF)
2009