ラマン分光法を用いたGaN/Siの残留歪みの評価に関する研究

Journal name: 豊田工業高等専門学校研究紀要 = Journal of National Institute of Technology, Toyota College (42) 2009

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: ラマン分光法を用いたGaN/Siの残留歪みの評価に関する研究
Author/Editor: 杉浦藤虎
本田善央
岡本明大他
Author Heading: 杉浦藤虎
本田善央
岡本明大
Alternative Title: Raman spectroscopic study of residual strain and stress in GaN layer grown on Si substrates
Periodical title: 豊田工業高等専門学校研究紀要 = Journal of National Institute of Technology, Toyota College
No. or year of volume/issue: (42) 2009
Issue: 42
Pages: 19～22
Publication date of volume/issue (W3CDTF): 2009
ISSN (Periodical Title): 0286-2603
ISSN-L (Periodical Title): 0286-2603
Publication (Periodical Title): 豊田 : 豊田工業高等専門学校
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: GaN
Si
strain
stress
Raman spectroscopy
XRD
NDLC: ZV1
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z22-583
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10571435
http://id.ndl.go.jp/bib/10571435
Bibliographic Record Category (NDL): 632