Reduction of accumulation capacitance in direct-contact HfO2/p-type Si metal-oxide-semiconductor capacitors
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- Material Type
- 記事
- Author/Editor
- Yasuhiro AbeNoriyuki MiyataHiroshi Nohira 他
- Author Heading
- Periodical title
- Japanese journal of applied physics : JJAP
- No. or year of volume/issue
- 49(6) (1) 2010.6
- Volume
- 49
- Issue
- 6
- Other Volume
- 1
- Pages
- 060202-1～3