Modulation of PtSi work function by alloying with low work function metal

• Material Type: 記事
• Title: Modulation of PtSi work function by alloying with low work function metal
• Author/Editor: Jun Gao; Jumpei Ishikawa; Shun-ichiro Ohmi
• Series Title: Silicon devices and materials
• Author Heading: Jun Gao; Jumpei Ishikawa; Shun-ichiro Ohmi
• Periodical title: 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
• No. or year of volume/issue: 110(110) 2010.6-7.30-2
• Volume: 110
• Issue: 110
• Pages: 173～176
• Publication date of volume/issue (W3CDTF): 2010
• ISSN (Periodical Title): 0913-5685
• ISSN-L (Periodical Title): 0913-5685
• Publication (Periodical Title): 東京 : 電子情報通信学会
• Place of Publication (Country Code): JP
• Text Language Code: eng
• Subject Heading: PtSi; monosilicide; alloy; Schottky barrier height; SBH; work function; sheet resistance; SWC-anneal
• NDLC: ZN33
• Target Audience: 一般
• Report No. (Article): SDM2010-92
• Holding library: 国立国会図書館
• Call No.: Z16-940
• Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 10753322; http://id.ndl.go.jp/bib/10753322
• Bibliographic Record Category (NDL): 632