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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 内田 大宇長谷川 周彦祖父江 英哲 他
- Alternative Title
- Evaluation of thin films prepared by r.f. sputtering with a poly(etheretherketone) target
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 53(7) 2010.7
- Volume
- 53
- Issue
- 7
- Pages
- 458~462