ダブプリズムを用いた接触画像解析に基づくポリシングパッド表面性状の定量評価手法の開発に関する研究--ドレッサ粒度がパッド表面性状に及ぼす影響
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 畝田 道雄岡部 憲嗣守屋 紀彦 他
- Alternative Title
- Development of evaluation method for geometrical characterization of polishing pad surface texture based on contact image analysis using image rotation prism: effect of mesh size of dresser grains on polishing pad surface texture
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 76(11) (通号 911) 2010.11
- Volume
- 76
- Issue
- 11
- Sequential issue number
- 911