雑誌兵庫県立大学工学研究科イオン工学研究室論文集
Volume number2009年度-2010年度
ArticleCluster si...

Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams

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Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams

Call No. (NDL)
Z74-E130
Bibliographic ID of National Diet Library
10917851
Material type
記事
Author
間下 喬史ほか
Publisher
姫路 : 兵庫県立大学工学研究科イオン工学研究室
Publication date
2009
Material Format
Paper
Journal name
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo 2009年度
Publication Page
p.50～53
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Paper

Material Type
記事
Title
Cluster size dependence of SiO2 thin film formation by O2 gas cluster ion beams
Author/Editor
間下 喬史
豊田 紀章
山田 公
Author Heading
間下 喬史
豊田 紀章
山田 公
Periodical title
兵庫県立大学工学研究科イオン工学研究室論文集 = Annual report of Ion Beam Engineering Laboratory, University of Hyogo
No. or year of volume/issue
2009年度
Volume
2009年度
Pages
50～53
Publication date of volume/issue (W3CDTF)
2009
Publication (Periodical Title)
姫路 : 兵庫県立大学工学研究科イオン工学研究室