Fe/Si、Fe/FeSi多層膜におけるイオン照射効果

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Material Type: 記事
Title: Fe/Si、Fe/FeSi多層膜におけるイオン照射効果
Author/Editor: 坂本勲
岡嵜聡
小池正記他
Author Heading: 坂本勲
岡嵜聡
小池正記
Periodical title: 法政大学イオンビーム工学研究所報告
No. or year of volume/issue: (30) 2009年度
Issue: 30
Pages: 24～27
Publication date of volume/issue (W3CDTF): 2009
ISSN (Periodical Title): 0286-0201
ISSN-L (Periodical Title): 0286-0201
Publication (Periodical Title): 小金井 : 法政大学イオンビーム工学研究所
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-411
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 11062010
http://id.ndl.go.jp/bib/11062010
Bibliographic Record Category (NDL): 632