Anode effects in electroplated Cu film (Proceedings of the 5th international symposium on practical surface analysis, PSA-10 and 7th Korea-Japan international symposium on surface analysis)
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- Material Type
- 記事
- Author/Editor
- Yong-Hyuk LeeHyunjin JuSa-Kyun Rha 他
- Author Heading
- Periodical title
- Journal of surface analysis / 表面分析研究会 編
- No. or year of volume/issue
- 17(3) 2011.3
- Volume
- 17
- Issue
- 3
- Pages
- 282～286