Volume number25(4)(79)
AES-IMA複合型...

AES-IMA複合型固体表面分析装置の開発と応用研究-1-二次イオン質量分析計の試作および性能評価

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AES-IMA複合型固体表面分析装置の開発と応用研究-1-二次イオン質量分析計の試作および性能評価

Call No. (NDL)
Z17-213
Bibliographic ID of National Diet Library
1918235
Material type
記事
Author
土井 紘
Publisher
東京 : 日本質量分析学会
Publication date
1977-12
Material Format
Digital
Journal name
質量分析 25(4) 1977.12
Publication Page
p.p325~349
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Detailed bibliographic record

Summary, etc.:

A combination system of SEM, AES and IMA are developed in one apparatus as a AES-IMA development(AID). A secondary ion mass spectrometer(SIMS)in the A...

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Bibliographic Record

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Digital

Material Type
記事
Author/Editor
土井 紘
Author Heading
Periodical title
質量分析
No. or year of volume/issue
25(4) 1977.12
Volume
25
Issue
4
Pages
p325~349
Publication date of volume/issue (W3CDTF)
1977-12