Volume number25(4)(79)
IMAによるシリコン...

IMAによるシリコン中のリン,ヒ素の定量分析

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IMAによるシリコン中のリン,ヒ素の定量分析

Call No. (NDL)
Z17-213
Bibliographic ID of National Diet Library
1918239
Material type
記事
Author
津山 斉ほか
Publisher
東京 : 日本質量分析学会
Publication date
1977-12
Material Format
Digital
Journal name
質量分析 25(4) 1977.12
Publication Page
p.p351~362
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Detailed bibliographic record

Summary, etc.:

Experimental study on the analysis of phosphorus and arsenic in silicon has beencarried out with Hitachi IMA-2type ion microanalyzer. It was found tha...

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Digital

Material Type
記事
Author/Editor
津山 斉
橋本 哲一
Periodical title
質量分析
No. or year of volume/issue
25(4) 1977.12
Volume
25
Issue
4
Pages
p351~362
Publication date of volume/issue (W3CDTF)
1977-12