多結晶Si-SiO2-Si構造におけるリン,ヒ素の挙動

Call No. (NDL): Z17-213
Bibliographic ID of National Diet Library: 1918241

Material type: 記事

Author: 橋本哲一ほか

Publisher: 東京 : 日本質量分析学会

Publication date: 1977-12

Material Format: Digital

Journal name: 質量分析 25(4) 1977.12

Publication Page: p.p363～370

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Detailed bibliographic record

Summary, etc.：: Phosphorus and arsenic profiles in polycrystalline Si-SiO<SUB>2</SUB>-Si structures were studied by ion microanalyzer, sup Pressed of edge effects by ...

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Material Type: 記事
Title: 多結晶Si-SiO2-Si構造におけるリン,ヒ素の挙動
Author/Editor: 橋本哲一
津山斉
Author Heading: 橋本哲一
津山斉
Periodical title: 質量分析
No. or year of volume/issue: 25(4) 1977.12
Volume: 25
Issue: 4
Pages: p363～370
Publication date of volume/issue (W3CDTF): 1977-12
ISSN (Periodical Title): 0542-8645
ISSN-L (Periodical Title): 0542-8645
Publication (Periodical Title): 東京 : 日本質量分析学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP4
Target Audience: 一般
Article Type: 記事分類: 化学・化学工業--無機化学・無機化学工業--非金属元素・非金属化合物
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (Materials For Handicapped People:2): プレーンテキスト
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 雑誌
https://dl.ndl.go.jp/collections/A00002
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Holding library: 国立国会図書館
Call No.: Z17-213
Periodical Title (Persistent ID (NDL)): info:ndljp/pid/2287070
https://dl.ndl.go.jp/pid/2287070
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 1918241
http://id.ndl.go.jp/bib/1918241
Bibliographic Record Category (NDL): 632