雑誌電気学会論文誌 D 産業応用部門誌
Volume number108(1)-108(6) 19880100-19880600
Articleマイクロマシーニング...

マイクロマシーニングとマイクロメカニクス<特集>

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マイクロマシーニングとマイクロメカニクス<特集>

Call No. (NDL)
Z16-1608
Bibliographic ID of National Diet Library
3166459
Material type
記事
Author
-
Publisher
東京 : 電気学会
Publication date
1988-03
Material Format
Paper
Journal name
電気学会論文誌. D, 産業応用部門誌 = IEEJ transactions on industry applications 108(3) 1988.03
Publication Page
p.p205～221
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Detailed bibliographic record

Summary, etc.：

記事分類: 機械工学--建築設備 ; 電気工学--電子工学--集積回路(Provided by: CiNii Research)

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Paper

Material Type
記事
Title
マイクロマシーニングとマイクロメカニクス<特集>
Periodical title
電気学会論文誌. D, 産業応用部門誌 = IEEJ transactions on industry applications
No. or year of volume/issue
108(3) 1988.03
Volume
108
Issue
3
Pages
p205～221
Publication date of volume/issue (W3CDTF)
1988-03
ISSN (Periodical Title)
0913-6339
ISSN-L (Periodical Title)
0913-6339