直流放電を用いた気相成長法によるダイヤモンド薄膜の作製と評価(プラズマプロセスー3-<特集>)

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Material Type: 記事
Title: 直流放電を用いた気相成長法によるダイヤモンド薄膜の作製と評価
Author/Editor: 安田浩明他
Series Title: プラズマプロセスー3-<特集>
Author Heading: 安田浩明
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 31(6) 1988.06
Volume: 31
Issue: 6
Pages: p637～643
Publication date of volume/issue (W3CDTF): 1988-06
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3193791
http://id.ndl.go.jp/bib/3193791
Bibliographic Record Category (NDL): 632