直接加熱方式CVD合成装置
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- Material Type
- 記事
- Title
- Author/Editor
- 大久保 昭
- Author Heading
- Periodical title
- 共通施設技術研究報告 / 東北大学金属材料研究所 [編]
- No. or year of volume/issue
- (通号 13) 1989.03
- Sequential issue number
- 13
- Pages
- p15～17
- Publication date of volume/issue (W3CDTF)
- 1989-03
- ISSN (Periodical Title)
- 0911-3398