4フッ化炭素プラズマによる炭素材料の表面改質時の加熱効果

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Material Type: 記事
Title: 4フッ化炭素プラズマによる炭素材料の表面改質時の加熱効果
Author/Editor: 泉順他
Author Heading: 泉順
Periodical title: 炭素 / 炭素材料学会編
No. or year of volume/issue: (通号 166) 1995.02
Sequential issue number: 166
Pages: p14～18
Publication date of volume/issue (W3CDTF): 1995-02
ISSN (Periodical Title): 0371-5345
ISSN-L (Periodical Title): 0371-5345
Publication (Periodical Title): 東京 : 炭素材料学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Article Type: 記事分類: 工業材料・材料試験
Holding library: 国立国会図書館
Call No.: Z17-230
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3593626
http://id.ndl.go.jp/bib/3593626
Bibliographic Record Category (NDL): 632