対向ターゲット式スパッタリング法の放電特性と堆積薄膜特性

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Material Type: 記事
Title: 対向ターゲット式スパッタリング法の放電特性と堆積薄膜特性
Author/Editor: 武井重人
森迫昭光
松本光功
Author Heading: 武井重人
森迫昭光
松本光功
Periodical title: 信州大学工学部紀要 / 信州大学工学部紀要委員会編
No. or year of volume/issue: (通号 76) 1995.09
Sequential issue number: 76
Pages: p13～20
Publication date of volume/issue (W3CDTF): 1995-09
ISSN (Periodical Title): 0037-3818
ISSN-L (Periodical Title): 0037-3818
Publication (Periodical Title): 長野 : 信州大学工学部
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM2
Target Audience: 一般
Article Type: 記事分類: 電気工学--電気材料・部品
Holding library: 国立国会図書館
Call No.: Z14-207
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3626348
http://id.ndl.go.jp/bib/3626348
Bibliographic Record Category (NDL): 632