CVD法による窒化タンタル薄膜の合成とその析出機構(CVD<特集> ; 膜・表面処理)

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: CVD法による窒化タンタル薄膜の合成とその析出機構
Author/Editor: 舟窪浩他
Series Title: CVD<特集> ; 膜・表面処理
Author Heading: 舟窪浩
Periodical title: 化学工学論文集
No. or year of volume/issue: 16(3) 1990.05
Volume: 16
Issue: 3
Pages: p430～437
Publication date of volume/issue (W3CDTF): 1990-05
ISSN (Periodical Title): 0386-216X
ISSN-L (Periodical Title): 0386-216X
Publication (Periodical Title): 東京 : 化学工学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-725
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3666993
http://id.ndl.go.jp/bib/3666993
Bibliographic Record Category (NDL): 632