ポリパラキシリレン系薄膜の高電界電導と絶縁破壊-2-オゾン酸化を用いた絶縁破壊機構の検討(固体絶縁体の電気伝導と絶縁破壊<特集>)

Journal name: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials 112(3) 1992.03

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Material Type: 記事
Title: ポリパラキシリレン系薄膜の高電界電導と絶縁破壊-2-オゾン酸化を用いた絶縁破壊機構の検討
Author/Editor: 森竜雄
松井俊雄
水谷照吉
Series Title: 固体絶縁体の電気伝導と絶縁破壊<特集>
Author Heading: 森竜雄
松井俊雄
水谷照吉
Periodical title: 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
No. or year of volume/issue: 112(3) 1992.03
Volume: 112
Issue: 3
Pages: p180～187
Publication date of volume/issue (W3CDTF): 1992-03
ISSN (Periodical Title): 0385-4205
ISSN-L (Periodical Title): 0385-4205
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-793
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3756497
http://id.ndl.go.jp/bib/3756497
Bibliographic Record Category (NDL): 632