エキシマレーザアブレーション法を用いた機能性薄膜の作製(原子層単位で制御される物質合成<特集>)

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Material Type: 記事
Title: エキシマレーザアブレーション法を用いた機能性薄膜の作製
Author/Editor: 田畑仁
川合知二
Series Title: 原子層単位で制御される物質合成<特集>
Author Heading: 田畑仁
川合知二
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 36(2) 1993.02
Volume: 36
Issue: 2
Pages: p81～86
Publication date of volume/issue (W3CDTF): 1993-02
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3808470
http://id.ndl.go.jp/bib/3808470
Bibliographic Record Category (NDL): 632