薄膜電子材料に関する研究--ビスマス系酸化物高温超伝導薄膜のハライドCVDとマイクロブリッジ特性
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- Material Type
- 記事
- Author/Editor
- 矢野 満明田辺 仁史前元 利彦
- Periodical title
- 中研所報 / 大阪工大摂南大学中央研究所 [編]
- No. or year of volume/issue
- 26(2) 1993
- Volume
- 26
- Issue
- 2
- Pages
- p47～59
- Publication date of volume/issue (W3CDTF)
- 1993