中間膜によるDLC膜の密着性改善
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- Material Type
- 記事
- Title
- Author/Editor
- 仁平 宣弘三尾 淳森河 和雄
- Periodical title
- 東京都立工業技術センター研究報告 / 東京都立工業技術センター 編
- No. or year of volume/issue
- (通号 25) 1996.03
- Sequential issue number
- 25
- Pages
- 13～16
- Publication date of volume/issue (W3CDTF)
- 1996-03
- ISSN (Periodical Title)
- 0285-6670