グロー放電水素化アモルファスシリコン膜の光照射による構造変化
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- Material Type
- 記事
- Author/Editor
- 安達 久美本橋 光也本間 和明 他
- Periodical title
- 東京電機大学工学部研究報告 / 東京電機大学工学部 編
- No. or year of volume/issue
- (通号 39) 1991.12
- Sequential issue number
- 39
- Pages
- 21～27
- Publication date of volume/issue (W3CDTF)
- 1991-12
- ISSN (Periodical Title)
- 0389-617X