TEOS/O2プラズマCVDによるプラスチック材料への硬質SiO2薄膜の低温形成第1報

Journal name: 自動車技術会論文集 = Transactions of the Society of Automotive Engineers of Japan / 自動車技術会編 27(4) 1996.10

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Material Type: 記事
Title: TEOS/O2プラズマCVDによるプラスチック材料への硬質SiO2薄膜の低温形成第1報
Author/Editor: 佐野慶一郎
玉巻宏章
野村雅也他
Author Heading: 佐野慶一郎
玉巻宏章
野村雅也
Periodical title: 自動車技術会論文集 = Transactions of the Society of Automotive Engineers of Japan / 自動車技術会編
No. or year of volume/issue: 27(4) 1996.10
Volume: 27
Issue: 4
Pages: 127～132
Publication date of volume/issue (W3CDTF): 1996-10
ISSN (Periodical Title): 0287-8321
ISSN-L (Periodical Title): 0287-8321
Publication (Periodical Title): 東京 : 自動車技術会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN22
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1092
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4067683
http://id.ndl.go.jp/bib/4067683
Bibliographic Record Category (NDL): 632