多数キャリヤ密度の温度依存性を用いた半導体中の不純物評価法

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多数キャリヤ密度の温度依存性を用いた半導体中の不純物評価法

Call No. (NDL)
Z16-1852
Bibliographic ID of National Diet Library
4172219
Material type
記事
Author
松浦 秀治ほか
Publisher
東京 : 電子情報通信学会エレクトロニクス ソサイエティ
Publication date
1997-03
Material Format
Paper
Journal name
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編 80(3) 1997.03
Publication Page
p.95~100
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Paper

Material Type
記事
Author/Editor
松浦 秀治
園井 量英
Periodical title
電子情報通信学会論文誌. C-2, エレクトロニクス. 2, 電子素子・応用 = The Transactions of the Institute of Electronics, Information and Communication Engineers. C-2 / 電子情報通信学会 編
No. or year of volume/issue
80(3) 1997.03
Volume
80
Issue
3
Pages
95~100
Publication date of volume/issue (W3CDTF)
1997-03