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0.8μmルールで製...

0.8μmルールで製作されたMOS-LSI試料の電子線音波顕微鏡による非破壊・内部観察

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0.8μmルールで製作されたMOS-LSI試料の電子線音波顕微鏡による非破壊・内部観察

Call No. (NDL)
Z14-158
Bibliographic ID of National Diet Library
4192204
Material type
記事
Author
竹野下 寛
Publisher
長崎 : 長崎大学教育学部
Publication date
1997-03
Material Format
Paper
Journal name
長崎大学教育学部自然科学研究報告 = Science bulletin of Faculty of Education, Nagasaki University / 長崎大学教育学部 編 (通号 56) 1997.03
Publication Page
p.41~46
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Paper Digital

Material Type
記事
Author/Editor
竹野下 寛
Author Heading
Periodical title
長崎大学教育学部自然科学研究報告 = Science bulletin of Faculty of Education, Nagasaki University / 長崎大学教育学部 編
No. or year of volume/issue
(通号 56) 1997.03
Sequential issue number
56
Pages
41~46
Publication date of volume/issue (W3CDTF)
1997-03
ISSN (Periodical Title)
0386-443X