Capabilities and Limitations of Plasma Polymerized Methylsilane(PPMS)All-dry Lithography

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Capabilities and Limitations of Plasma Polymerized Methylsilane(PPMS)All-dry Lithography

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Material Type: 記事
Title: Capabilities and Limitations of Plasma Polymerized Methylsilane(PPMS)All-dry Lithography
Author/Editor: Gary Dabbagh
Richard S. Hutton
Raymond A. Cirelli 他
Author Heading: Gary Dabbagh
Richard S. Hutton
Raymond A. Cirelli
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 11(4) 1998
Volume: 11
Issue: 4
Pages: 651～662
Publication date of volume/issue (W3CDTF): 1998
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4525949
http://id.ndl.go.jp/bib/4525949
Bibliographic Record Category (NDL): 632