ECRスパッタ法によ...

ECRスパッタ法によるCo-Cr-Ta/Ti垂直磁気ディスクの作製--マイクロ波電力による物性制御

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ECRスパッタ法によるCo-Cr-Ta/Ti垂直磁気ディスクの作製--マイクロ波電力による物性制御

Call No. (NDL)
Z16-1010
Bibliographic ID of National Diet Library
5287101
Material type
記事
Author
池田 朋広ほか
Publisher
東京 : 映像情報メディア学会
Publication date
2000-01
Material Format
Paper
Journal name
映像情報メディア学会技術報告 = ITE technical report 24(4) 2000.01
Publication Page
p.1~8
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Paper Digital

Material Type
記事
Author/Editor
池田 朋広
山本 節夫
平田 京 他
Periodical title
映像情報メディア学会技術報告 = ITE technical report
No. or year of volume/issue
24(4) 2000.01
Volume
24
Issue
4
Pages
1~8
Publication date of volume/issue (W3CDTF)
2000-01