Static capacitance contrast of LSI covered with an insulator film in low accelerating voltage scanning electron microscope

Publisher: Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press

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Material Type: 記事
Title: Static capacitance contrast of LSI covered with an insulator film in low accelerating voltage scanning electron microscope
Author/Editor: Katsumi Ura
Sadao Aoyagi
Author Heading: Katsumi Ura
Sadao Aoyagi
Periodical title: Journal of electron microscopy
No. or year of volume/issue: 49(1) 2000
Volume: 49
Issue: 1
Pages: 157～162
Publication date of volume/issue (W3CDTF): 2000
ISSN (Periodical Title): 0022-0744
Publication (Periodical Title): Oxford : Published for the Japanese Society of Electron Microscopy by Oxford University Press
Place of Publication (Country Code): GB
Text Language Code: eng
Subject Heading: re-distribution of secondary electrons
passivated LSI
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-T76
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5315963
http://id.ndl.go.jp/bib/5315963
Bibliographic Record Category (NDL): 632