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解説 各種ドライポンプの現状と課題 (小特集 ドライポンプ)

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解説 各種ドライポンプの現状と課題(小特集 ドライポンプ)

Call No. (NDL)
Z16-474
Bibliographic ID of National Diet Library
5359782
Material type
記事
Author
澤田 雅
Publisher
東京 : 日本真空協会
Publication date
2000-05
Material Format
Paper
Journal name
真空 = Journal of the Vacuum Society of Japan 43(5) 2000.05
Publication Page
p.557~563
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Paper Digital

Material Type
記事
Author/Editor
澤田 雅
Author Heading
Periodical title
真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue
43(5) 2000.05
Volume
43
Issue
5
Pages
557~563