ホットホール注入によるトンネルゲート酸化膜の絶縁性劣化 (特集:極微構造集積デバイス・プロセス技術)

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ホットホール注入によるトンネルゲート酸化膜の絶縁性劣化(特集:極微構造集積デバイス・プロセス技術)

Call No. (NDL)
Z16-795
Bibliographic ID of National Diet Library
5689475
Material type
記事
Author
鎌倉 良成ほか
Publisher
東京 : 電気学会
Publication date
2001-03
Material Format
Paper
Journal name
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems 121(3) 2001.3
Publication Page
p.492~498
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Paper Digital

Material Type
記事
Author/Editor
鎌倉 良成
出口 和亮
石田 明寛 他
Periodical title
電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
No. or year of volume/issue
121(3) 2001.3
Volume
121
Issue
3
Pages
492~498