超高真空スパッタリング装置を用いた多結晶Si膜の形成(小特集多結晶Si薄膜トランジスタ製作へのプラズマ技術の応用)

Holdings of Libraries in Japan

This page shows libraries in Japan other than the National Diet Library that hold the material.

Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.

other

CiNii Research
Search Service
Digital
You can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Check the holdings of this book

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 記事
Title: 超高真空スパッタリング装置を用いた多結晶Si膜の形成
Author/Editor: 三島康由
Series Title: 小特集多結晶Si薄膜トランジスタ製作へのプラズマ技術の応用
Author Heading: 三島康由
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(6) 2001.6
Volume: 44
Issue: 6
Pages: 578～582
Publication date of volume/issue (W3CDTF): 2001-06
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5827292
http://id.ndl.go.jp/bib/5827292
Bibliographic Record Category (NDL): 632