イオンプレーティング法による窒化珪素薄膜の特性--窒化ケイ素薄膜の残留応力の測定

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Material Type: 記事
Title: イオンプレーティング法による窒化珪素薄膜の特性--窒化ケイ素薄膜の残留応力の測定
Author/Editor: 鈴木泰夫
石川宏美
蓮見薫
Author Heading: 鈴木泰夫
石川宏美
蓮見薫
Periodical title: 千葉県機械金属試験場研究報告
No. or year of volume/issue: (30) 2000
Issue: 30
Pages: 14～18
Publication date of volume/issue (W3CDTF): 2000
ISSN (Periodical Title): 0289-0216
ISSN-L (Periodical Title): 0289-0216
Publication (Periodical Title): 千葉 : 千葉県機械金属試験場
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN11
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-851
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5880554
http://id.ndl.go.jp/bib/5880554
Bibliographic Record Category (NDL): 632