スパッタリングプロセス中の不純物制御による機能性磁性薄膜の微細組織制御(小特集「真空利用プロセスの診断と制御:最近の進展」)

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Material Type: 記事
Title: スパッタリングプロセス中の不純物制御による機能性磁性薄膜の微細組織制御
Author/Editor: 高橋研
角田匡清
David D. Djayaprawira
Series Title: 小特集「真空利用プロセスの診断と制御:最近の進展」
Author Heading: 高橋研
角田匡清
David D. Djayaprawira
Periodical title: 真空 = Journal of the Vacuum Society of Japan
No. or year of volume/issue: 44(7) 2001.7
Volume: 44
Issue: 7
Pages: 631～648
Publication date of volume/issue (W3CDTF): 2001-07
ISSN (Periodical Title): 0559-8516
ISSN-L (Periodical Title): 0559-8516
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5884432
http://id.ndl.go.jp/bib/5884432
Bibliographic Record Category (NDL): 632