HCD方式反応性イオンプレーティング法により形成したチタン窒化物皮膜に発生する圧縮応力への影響因子
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- Material Type
- 記事
- Author/Editor
- 三浦 健一石神 逸男
- Periodical title
- 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
- No. or year of volume/issue
- 65(11) 2001
- Volume
- 65
- Issue
- 11
- Pages
- 981～986
- Publication date of volume/issue (W3CDTF)
- 2001