Nanofabrication of Si and its related materials with an electron beam (日本電子顕微鏡学会第46回シンポジウム材料のナノ・生物のナノ ; 材料系セッション3 TEMとナノファブリケーション)

Nanofabrication of Si and its related materials with an electron beam

(日本電子顕微鏡学会第46回シンポジウム材料のナノ・生物のナノ ; 材料系セッション3 TEMとナノファブリケーション)

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Material Type: 記事
Title: Nanofabrication of Si and its related materials with an electron beam
Author/Editor: 竹口雅樹
K. Furuya
Series Title: 日本電子顕微鏡学会第46回シンポジウム材料のナノ・生物のナノ ; 材料系セッション3 TEMとナノファブリケーション
Author Heading: 竹口雅樹
K. Furuya
Alternative Title: 電子ビームによるナノ構造創製
Periodical title: 電子顕微鏡 / 「電子顕微鏡」編集委員会編
No. or year of volume/issue: 36(-) (Suppl.2) 2001
Volume: 36
Issue: -
Other Volume: Suppl.2
Pages: 84～87
Publication date of volume/issue (W3CDTF): 2001
ISSN (Periodical Title): 0417-0326
ISSN-L (Periodical Title): 0417-0326
Publication (Periodical Title): 東京 : 日本顕微鏡学会
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-896
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 5992291
http://id.ndl.go.jp/bib/5992291
Bibliographic Record Category (NDL): 632