Role of Ultra Thin SiOx Layer for Epitaxial Growth of YSZ/SiOx/(001)Si Thin Films (Special Issue Ceramics Integration)

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Role of Ultra Thin SiOx Layer for Epitaxial Growth of YSZ/SiOx/(001)Si Thin Films(Special Issue Ceramics Integration)

Call No. (NDL)
Z17-249
Bibliographic ID of National Diet Library
6154148
Material type
記事
Author
木口 賢紀ほか
Publisher
東京 : 日本セラミックス協会
Publication date
2002-05
Material Format
Paper
Journal name
日本セラミックス協会学術論文誌 / 日本セラミックス協会 [編] 110(1281) 2002.5
Publication Page
p.338~342
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Material Type
記事
Author/Editor
木口 賢紀
脇谷 尚樹
篠崎 和夫 他
Alternative Title
YSZ/SiOx/(001)Si薄膜のエピタキシャル成長における極薄SiOx層の役割
Periodical title
日本セラミックス協会学術論文誌 / 日本セラミックス協会 [編]
No. or year of volume/issue
110(1281) 2002.5
Volume
110
Issue
1281